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- 1994³â º½ : ¹Ì±¹ NRC(National Research Council)ÀÇ ÀÇ·Ú ÇÏ¿¡ µ¥ÀÌÅͺ£À̽ºÀÇ Á߿伺¿¡ ´ëÇÑ ¿¬±¸¸¦ Âø¼öÇÔ
- 1996³â "Database Needs for Modeling and Simulation of Plasma Processing"¹ß°£
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- Greater and more systematic efforts should be made by Federal and industrial agencies to address database needs with emphasis on plasma surface interactions
- Target chemistries should have a high priority in database development because
the application are currently important and will continue to be important over the next5-10 years