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NRC Panel on Database Needs For modeling and simulation of plasma processing
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    • 1994³â º½ : ¹Ì±¹ NRC(National Research Council)ÀÇ ÀÇ·Ú ÇÏ¿¡ µ¥ÀÌÅͺ£À̽ºÀÇ Á߿伺¿¡ ´ëÇÑ ¿¬±¸¸¦ Âø¼öÇÔ
    • 1996³â "Database Needs for Modeling and Simulation of Plasma Processing"¹ß°£
    • ÇöÀçÀÇ ÇöóÁ ½Ã¹Ä·¹À̼Ç,¸ðµ¨¸µ ±×¸®°í ÇöóÁ ¹°Áú ¿¬±¸¿¡ ÇÊ¿äÇÑ µ¥ÀÌÅͺ£À̽º »óȲÆÄ¾Ç
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    • Greater and more systematic efforts should be made by Federal and industrial agencies to address database needs with emphasis on plasma surface interactions
    • Target chemistries should have a high priority in database development because the application are currently important and will continue to be important over the next5-10 years

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